My research group develops precision mechatronic instruments for micro- and nanoscale positioning, imaging, manipulation, and force sensing. These capabilities are essential for semiconductor metrology, lithography, inspection, micro-assembly, materials characterization, and mechanobiology, where conventional systems are often limited by friction, backlash, hysteresis, drift, low throughput, or bulky form factors. Our goal is to create compact, modular, and cost-effective instruments that combine first-principles modeling, sensors and actuators, MEMS, electromagnetics, acoustics, robotics, and feedback control.
One major research thrust is contact-free nanopositioning. We develop hybrid levitation platforms that combine diamagnetic, near-field acoustic, hydrodynamic, and electromagnetic actuation principles to achieve large-range, multi-degree-of-freedom motion with nanometer-scale precision. These systems aim to provide high bandwidth, high payload capacity, and compact integration with existing imaging, lithography, and semiconductor metrology tools.
A second thrust focuses on miniaturized and high-throughput scanning probe microscopy. We develop MEMS-based AFM architectures with integrated microcantilever actuators and sensors for parallel imaging, as well as automated in-situ AFM tip-replacement mechanisms to reduce downtime and improve instrument usability. These technologies address the need for faster and more scalable nanoscale surface characterization in advanced manufacturing and materials research.
A third thrust explores untethered micro-robotic systems and acoustic manipulation. By designing planar electromagnetic actuators, levitated micro-robots, and acoustic tweezer platforms, we seek to enable scalable manipulation, assembly, and transport of delicate micro-objects in air and liquid.
A fourth thrust develops feedback-controlled MEMS force sensors and micro-robotic tools for applying and measuring calibrated nanonewton forces. These platforms can support studies of cell mechanics, pain hypersensitivity, and mechano-electrophysiology by combining mechanical stimulation with electrical measurements.
Across these directions, my lab aims to train students to build complete instruments from physical principles to deployable prototypes, while contributing to technologies relevant to semiconductor manufacturing, robotics, and biomedical science.